Automatic pitch decomposition for improved process window when printing dense features at k1eff<0.20 (2006)
Journal Information
Journal Title:
Proceedings of SPIE
Volume Number:
6283
Page Number:
62830
Book Information
Book Title:
NA
Chapter:
NA
Page Number:
NA
Conference Information
Conference Title:
NA
Paper Number:
NA
Start Date:
NA
End Date:
NA
Authors
Huckabay, Judy
Staud, Wolf
Naber, Robert
Dusa, Mircea
Flagello, Donis George
Socha, Robert
Subjects
NA
Go back
Go to Start