Interferometric techniques applied in packaged MEMS and MOEMS measurement (2006)
Journal Information
Journal Title:
Proceedings of SPIE
Volume Number:
6149
Page Number:
614901
Book Information
Book Title:
NA
Chapter:
NA
Page Number:
NA
Conference Information
Conference Title:
NA
Paper Number:
NA
Start Date:
NA
End Date:
NA
Authors
Han, Sen
Subjects
NA
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