Process results using automatic pitch decomposition and double patterning technology (DPT) at k1eff <0.20 (2006)
Journal Information
Journal Title:
Proceedings of SPIE
Volume Number:
6349
Page Number:
634910
Book Information
Book Title:
NA
Chapter:
NA
Page Number:
NA
Conference Information
Conference Title:
NA
Paper Number:
NA
Start Date:
NA
End Date:
NA
Authors
Huckabay, Judy
Staud, Wolf
Naber, Robert
Van Oosten, Anton
Nikolski, Peter
Hsu, Stephen
Socha, Robert
Dusa, Mircea
Flagello, Donis George
Subjects
NA
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