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The laboratory for lithography in
micro- and diffractive optics seeks to become a premier research
resource
within the Optical Sciences Center and the
University of Arizona. Our core focus continues to be
the development and manufacture of micro-optical devices. Our
unique capabilities include grayscale, maskless, lithography, access
to a class 100 cleanroom and metrology (profilometer and SEM), and
proprietary sol-gel materials..
Our goals for 2004:
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Develop a
resource for rapid prototype of micro-component design and
validation of new materials. |
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Research
photo-tool architecture and processes necessary to predictably
manufacture micro devices using high-speed
maskless grayscale lithography. |
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Provide a
graduate education experience that prepares a new generation of
scientists and engineers with expertise in the design and
manufacturing of innovative instruments. |
Please browse our website and feel free to contact us regarding
potential collaborative efforts.
The Optical Sciences Center is pleased to
announce a Computer Generated Holography Workshop, being
offered August 17th - 19th. The intended audience is
scientists, engineers, managers and researchers who want to learn
both theory and hands-on application in this exciting field. Click
on the .pdf below to learn more:
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The Optical Sciences Center
High-Speed Grayscale
Maskless Lithography Tool
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....since February 19th, 2004
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