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The laboratory for lithography in
micro- and diffractive optics seeks to become a premier research
resource
within the College of Optical Sciences and the
University of Arizona. Our core focus continues to be
the development and fabrication of micro-optical devices. Our
unique capabilities include maskless
grayscale
lithography, measurement with advanced profilometry (Veeco NT9800),
flexible exposure materials and processes (standard photoresist,
polyimides, SU8, sol gels, Cr, Al, Si, calcite, etc.), substrate
preparation (cutting, lapping and polishing), and pattern transfer
via RIE and/or Ar+ milling. An easy-to-use interface is
available for users to input gray-scale data in the form of 8-bit
BMP files.
Our goals:
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Develop a
resource for rapid prototype of micro-component design and
validation of new materials. |
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Research
photo-tool architecture and processes necessary to predictably
manufacture micro devices using high-speed
maskless grayscale lithography. |
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Provide a
graduate education experience that prepares a new generation of
scientists and engineers with expertise in the design and
manufacturing of innovative instruments. |
Please browse our website and feel free to contact us regarding
potential collaborative efforts.
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The Optical Sciences Center
Maskless Lithography Tool
(MLT)
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....since August 24th, 2009
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