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New OSC workshop initiative...

COMPUTER GENERATED HOLOGRAPHY WORKSHOP

....click on the .pdf at right to learn more!


Mission Statement

     The laboratory for lithography in micro- and diffractive optics seeks to become a premier research resource within the College of Optical Sciences and the University of Arizona.  Our core focus continues to be the development and fabrication of micro-optical devices.  Our unique capabilities include maskless grayscale lithography, measurement with advanced profilometry (Veeco NT9800), flexible exposure materials and processes (standard photoresist, polyimides, SU8, sol gels, Cr, Al, Si, calcite, etc.), substrate preparation (cutting, lapping and polishing), and pattern transfer via RIE and/or Ar+ milling.  An easy-to-use interface is available for users to input gray-scale data in the form of 8-bit BMP files.

Our goals:

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Develop a resource for rapid prototype of micro-component design and validation of new materials.

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Research photo-tool architecture and processes necessary to predictably manufacture micro devices using high-speed maskless grayscale lithography.

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Provide a graduate education experience that prepares a new generation of scientists and engineers with expertise in the design and manufacturing of innovative instruments.

Please browse our website and feel free to contact us regarding potential collaborative efforts.

 

 

The Optical Sciences Center

 

 

 

 

 

Maskless Lithography Tool

(MLT)

 

  

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   ....since August 24th, 2009