|
The bulk of our
recent efforts has been the development of a High-Speed
Maskless Grayscale Lithography (HSMGL) phototool for
UV exposure of photosensitive materials, such as photoresist and
solgels.
The Laboratory
for Diffractive and Microoptics also includes (but is not limited to) a
variety of other equipment and facilities....
 |
Access
to a Class 100 Cleanroom |
|
Scanning
Electron Microscope |
|
White
Light Interferometer |
|
Wet
bench and spinner |
The OSC Maskless Lithography Tool is specifically modified to
pattern grayscale images from JPEG, BMP or other common digital
image formats. The phototool is capable of high speed imaging… a 12k
x 12k image over a 25mm x 25mm area is imaged in less than 15
seconds.
HSMGL
We have recently upgraded our electronics to provide the ability to
pattern 1-2.5 micron pixels with 10-bit of electronic grayscale
control.
We are
looking for further applications to validate our tool. Please
contact us if you think your research
could benefit from its use.
|
