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The Model Sampling Panel lets the user set sampling values that are used in the simulation.
| - | The sampling used by the Optics object for High Numerical Aperature calculations. | |
| - | The sampling used by the Optics object for Fresnel calculations. | |
| - | The sampling used by the Optics object for Low Numerical Aperature calculations. | |
| - | The sampling used by the Multilayer Target. | |
| - | The sampling used by the Multilayer-Lithographic-Target. |
It is often important for the specified sampling value to a power of 2! This is because the Fast Fourier Transform calculation is very fast for these values.