Colloquium: John Bruning

    Thursday, March 1, 2018 - 3:30pm - 5:00pm
    Meinel 307

    Phase Measuring Interferometry – Roles in the microelectronics revolution and astronomy


    The microelectronics revolution has been ongoing now for more than 50 years.  The pace of progress, described as “Moore’s Law”, is an observation and expectation of microcircuit performance and value that doubles every two years.  My talk will focus on the evolution of phase measuring interferometry from the late 1960’s to today with a focus on stories, history and applications.

    Speaker Bio(s): 

    John Bruning received a BSEE at Penn State in 1964 and MS & PhD degrees in EE at the University of Illinois in 1969.  His research focus was on the rigorous coupled Scattering of EM waves by Spheres.  He started his professional career in 1969 at Bell Laboratories in Murray Hill, NJ as a member of the technical staff in the Optics Group.  His first major project was focused on high accuracy interferometry for testing precision optical surfaces and lenses, primarily to support the manufacture of high precision optics that print the circuit patterns for microchips.  Out of this work came computerized phase measuring interferometry (PMI) common to modern digital interferometers from Tropel, Zygo, Wyco and others.  In 1973, he became Supervisor of the Inspection Systems and Optics Group to develop several generations of mask inspection systems for microlithography.  From 1979 to 1984, he supervised the New Lithographic Systems Group, demonstrating line narrowed, Deep-UV Photolithography at 248nm.  In 1984 he left Bell Laboratories to become the General Manager of Tropel, a spinout of UR Institute of Optics to facilitate commercializing Deep-UV microlithography.  He guided Tropel through several turbulent cycles of the semiconductor industry, taking the company private in 1994, selling the company to Corning in 2001 and retiring in 2009. In retirement, he remains involved with entrepreneurs, non-profit boards and Rochester’s Science Museum.