Patent 5,502,566

Patent Number: 
5,502,566
Patent Title: 
Method and apparatus for absolute optical measurement of entire surfaces of flats
Faculty, Staff or Student Author(s): 
James C. Wyant
Faculty, Staff or Student Author(s): 
Robert E. Parks
All Author(s): 

Chiayu Ai, James C. Wyant, Lian-Zhen Shao and Robert E. Parks