Dissertation Defense: Rebecca Su, "Non-contact Optical Metrology of Reflective and Refractive Systems"

Title: Non-contact Optical Metrology of Reflective and Refractive Systems

Abstract

This dissertation investigates two projects relating to non-contact optical metrology in reflective and refractive systems.  The first project is the development of an efficiency test for a custom diffraction grating for the Aspera mission.  The test was simulated and the hardware for the test was assembled in preparation for extreme ultraviolet vacuum tank conditions.  The second project describes the development of an on-axis deflectometry system for the measurement of the wavefront error of thin meniscus lenses.  This system was proposed, built, and tested and the results were compared to those from a commercial interferometer.  Both of these projects display the versatility of non-contact optical metrology concepts in reflective and refractive systems and their practical applications.