Regents' Professor of Chemical and Environmental Engineering
Regents' Professor of Optical Sciences
Director of the Semiconductor Research Corporation Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Department of Chemical and Environmental Engineering
The University of Arizona
P.O. Box 210011
Tucson, AZ 85721-0011
Specific Research Interests:
- Applications of chemical reaction engineering in semiconductor and optoelectronics manufacturing.
- Advanced materials processing and environmental contamination control.
- Ph.D., University of California, Berkeley, 1972